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 XPS  Ion sputtering speed - page 10



This study gives for each material a speed index associated with a given a current density (coming from ion sputtering). These indexes are illustrated by Graph. 1.


Graph 1: Raw summary of studied material speed indexes as a function of the current density.

It is actually impossible to refine these speed indexes because they cannot be directly compared against our reference index that was established with a different current density.

From previous experiments, attempting to optimise settings for ion sputtering, it is possible to create a summary table for SiO2 by comparing speed indexes and current density for these "Pre" specimens (i.e. training beginning, Graph. 2).



Graph.2: Speed index vs current density for SiO2 specimens

Graph. 2 shows a series of 3 experiments with three different ion energies (BE). From this graphic, the higher the current density, the higher the speed index. From this graphic, a straight line D is evaluated. This line represents the relation between speed index and current density and seems to be linear for the experimental conditions of this study.

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